Surface micro-machined SU-8 2002 membrane mirrors for focus control

Sarah J. Lukes; David Lämmle; David L. Dickensheets

doi:10.1117/12.844292

16 February 2010 Surface micro-machined SU-8 2002 membrane mirrors for focus control

Sarah J. Lukes, David Lämmle, David L. Dickensheets

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940E (2010) https://doi.org/10.1117/12.844292
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

We have built 1 mm circular and 1 mm × 1.4 mm elliptical surface micro-machined SU-8 2002 deformable mirrors for focus control. The SU-8 2002 membrane layers are 2.25 μm thick with gold as the reflective coating on their surfaces. Three annular electrodes were used for electrostatic actuation. Stable deflection was observed up to 6.8 μm for a 1 mm × 1.4 mm elliptical mirror with an air gap of 14 μm. The frequency response of the membrane exhibited a 3 dB frequency larger than 10 kHz.

Citation Download Citation

Sarah J. Lukes, David Lämmle, and David L. Dickensheets "Surface micro-machined SU-8 2002 membrane mirrors for focus control", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940E (16 February 2010); https://doi.org/10.1117/12.844292

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