Resonance MEMS mirrors design considerations

S. Sourani

doi:10.1117/12.846272

16 February 2010 Resonance MEMS mirrors design considerations

S. Sourani

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 759409 (2010) https://doi.org/10.1117/12.846272
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Resonance MEMS mirrors are widely used today for many applications such as barcode scanners and personalprojectors. bTendo manufactures Personal Projection Engines on two types of mirrors: 1. Resonance mirrors for horizontal scanning 2. Linear mirrors for vertical scanning In this lecture we will discuss the "Energy Balance" and start-up conditions for resonance mirrors. We will derive the conditions for start-up as well as the predicted curve of θ(v): (see manuscript for equation) We will show simulation results in the time domain that prove the validity of the last equation. Finite element simulation could be used to calculate the comb capacitance and to predict the performance of a new structure.

Citation Download Citation

S. Sourani "Resonance MEMS mirrors design considerations", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759409 (16 February 2010); https://doi.org/10.1117/12.846272

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