A microfluidic-photonic-integrated device with enhanced excitation power density

Benjamin R. Watts; Thomas Kowpak; Chang-Qing Xu; Shiping Zhu; Zhiyi Zhang

doi:10.1117/12.841046

19 February 2010 A microfluidic-photonic-integrated device with enhanced excitation power density

Benjamin R. Watts, Thomas Kowpak, Chang-Qing Xu, Shiping Zhu, Zhiyi Zhang

Proceedings Volume 7555, Advanced Biomedical and Clinical Diagnostic Systems VIII; 75550R (2010) https://doi.org/10.1117/12.841046
Event: SPIE BiOS, 2010, San Francisco, California, United States

Abstract

The power density of optical excitation in microfluidic-photonic-integrated flow cytometers is typically provided from an integrated waveguide and the beam is therefore divergent within the microchannel due to the NA of the waveguide; a detrimental effect on detection capabilities as excitation is not uniform throughout the channel and will generate a long pulse for excitation. Through integration of a lens system specially designed and simulated to collect and reshape 100% of input power, the excitation power within the microchannel has been controlled to form an optimal spot size within the microchannel. The device was formed via a one-shot processing method where designs are patterned into a SU-8 layer on a Pyrex substrate. A poly(dimethylsiloxane) (PDMS) layer was used to seal the device and serve as an upper cladding for integrated waveguides. Spot sizes were improved from an unfocused width of 86um to less than 40um. Power densities were controlled throughout the width of the channel - an improvement for flow cytometry applications.

Citation Download Citation

Benjamin R. Watts, Thomas Kowpak, Chang-Qing Xu, Shiping Zhu, and Zhiyi Zhang "A microfluidic-photonic-integrated device with enhanced excitation power density", Proc. SPIE 7555, Advanced Biomedical and Clinical Diagnostic Systems VIII, 75550R (19 February 2010); https://doi.org/10.1117/12.841046

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