Impact of lamp instability on rotating compensator based ellipsometry

Chunguang Hu; Lidong Sun

doi:10.1117/12.837430

25 November 2009 Impact of lamp instability on rotating compensator based ellipsometry

Chunguang Hu, Lidong Sun

Proceedings Volume 7506, 2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 750617 (2009) https://doi.org/10.1117/12.837430
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

The influence of statistical noise such as lamp instability, photon shot noise, and detection noise on the signal quality in rotating compensator based ellipsometry (RCE) is investigated by means of mathematical modeling and simulations. The results uncover the transfer route from noise to measurement error under different experimental conditions, and thus provide a basis for noise diagnosis and control in RCE systems.

Citation Download Citation

Chunguang Hu and Lidong Sun "Impact of lamp instability on rotating compensator based ellipsometry", Proc. SPIE 7506, 2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 750617 (25 November 2009); https://doi.org/10.1117/12.837430

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