FPGA as the programmable tool for yield improvement

Tho L. La; Xiao-Yu Li; Charles Chen; M. H. Wang; Chih-Chung Huang; Ching-Tsai Chang; Hornjaan Lin; Yming Tseng; Ian Tseng; You R. Wu; Shih Chieh Lo; Sam C. Y. Lin

doi:10.1117/12.829744

23 September 2009 FPGA as the programmable tool for yield improvement

Tho L. La, Xiao-Yu Li, Charles Chen, M. H. Wang, Chih-Chung Huang, Ching-Tsai Chang, Hornjaan Lin, Yming Tseng, Ian Tseng, You R. Wu, Shih Chieh Lo, Sam C. Y. Lin

Author Affiliations +

Proceedings Volume 7488, Photomask Technology 2009; 74883N (2009) https://doi.org/10.1117/12.829744
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

FPGA programmability is utilized to profile the intra-field process variation through mapping of Tilo propagation delay within a reticle field. ASML DoseMapper patented technology is used to optimize poly photo exposure based on the FPGA intra-field process variation profile. As a result, significant yield and performance improvement is achieved.

Citation Download Citation

Tho L. La, Xiao-Yu Li, Charles Chen, M. H. Wang, Chih-Chung Huang, Ching-Tsai Chang, Hornjaan Lin, Yming Tseng, Ian Tseng, You R. Wu, Shih Chieh Lo, and Sam C. Y. Lin "FPGA as the programmable tool for yield improvement", Proc. SPIE 7488, Photomask Technology 2009, 74883N (23 September 2009); https://doi.org/10.1117/12.829744

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