A cost of ownership model for imprint lithography templates for HDD applications

Brian J. Grenon

doi:10.1117/12.833468

23 September 2009 A cost of ownership model for imprint lithography templates for HDD applications

Brian J. Grenon

Proceedings Volume 7488, Photomask Technology 2009; 74880U (2009) https://doi.org/10.1117/12.833468
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

Cost of ownership projections have often been used to determine the potential costs associated with the introduction of novel lithography applications. While they are often controversial and their accuracy or usefulness are a function of the validity of the assumptions used to build the model; they provide insight to the real technical issues, as well as, the critical areas that required the most financial and technical resources for success and profitability. This paper will provide a first look at the key technical and financial challenges of using nano-imprint technology for the fabrication of hard disk drives (HDD). The focus will be on the master template/stamp cost of ownership, pattern generation time, inspection and repair and yield. This paper will not address the costs associated with replication of the master template because many of the assumptions for replication robustness have yet to be realized in a production environment.

Citation Download Citation

Brian J. Grenon "A cost of ownership model for imprint lithography templates for HDD applications", Proc. SPIE 7488, Photomask Technology 2009, 74880U (23 September 2009); https://doi.org/10.1117/12.833468

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