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24 August 2009 Transverse and axial beam shaping in the non-paraxial domain
Stephen M. Kuebler, Toufic G. Jabbour
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Proceedings Volume 7430, Laser Beam Shaping X; 743002 (2009) https://doi.org/10.1117/12.827475
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States
Abstract
The design of beam-shaping pupil filters most commonly employs the scalar theory of diffraction, which does not accurately describe the focal field distribution under high numerical aperture focusing. To account for the full vector character of the field, we have developed computational algorithms for designing phase-only pupil filters that incorporate the electromagnetic theory of diffraction. These algorithms use the method of generalized projects or particle swarm optimization to generate phase-filter solutions based on a targeted focal field irradiance distribution. Computational results are presented that demonstrate how these procedures can be used to design phase filters that reshape the transverse beam, or achieve axial super-resolution for a single focused spot. The methods can be applied in the design of beam-shaping and superresolving optics used for imaging, direct laser writing, and lithography.
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Stephen M. Kuebler and Toufic G. Jabbour "Transverse and axial beam shaping in the non-paraxial domain", Proc. SPIE 7430, Laser Beam Shaping X, 743002 (24 August 2009); https://doi.org/10.1117/12.827475
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KEYWORDS
Diffractive optical elements
Beam shaping
Diffraction
Point spread functions
Super resolution
Particle swarm optimization
Detection and tracking algorithms
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