Laminar linear weak-link mechanisms with sub-centimeter travel range and sub-nanometer positioning resolution

Deming Shu; Jörg Maser

doi:10.1117/12.824365

10 September 2009 Laminar linear weak-link mechanisms with sub-centimeter travel range and sub-nanometer positioning resolution

Deming Shu, Jörg Maser

Author Affiliations +

Proceedings Volume 7424, Advances in Optomechanics; 74240D (2009) https://doi.org/10.1117/12.824365
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

A 2-D linear flexure stage system is designed with high structure stiffness using the laminar over-constrained weak-link mechanism presented in this paper. This design is a new development in the application of redundantly constrained laminar structures as weak-link mechanisms. The novelty of this new mechanical design is its fishbone-shaped multiple-parallelogram structure, which performs the function of a high-stiffness, high-precision linear motion guider with subcentimeter travel range and sub-nanometer positioning resolution. Potential applications of this new stage system include advanced development of ultra-precision positioning stages for the scanning x-ray nanoprobes, long-range scanning atomic force microscopes, and equipment for nanotechnology and semiconductor industries.

Citation Download Citation

Deming Shu and Jörg Maser "Laminar linear weak-link mechanisms with sub-centimeter travel range and sub-nanometer positioning resolution", Proc. SPIE 7424, Advances in Optomechanics, 74240D (10 September 2009); https://doi.org/10.1117/12.824365

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