High-performance multi-channel fiber-based absolute distance measuring interferometer system

Leslie L. Deck

doi:10.1117/12.826253

21 August 2009 High-performance multi-channel fiber-based absolute distance measuring interferometer system

Leslie L. Deck

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050E (2009) https://doi.org/10.1117/12.826253
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

I describe the principle of operation and performance of a fiber-based absolute distance measuring interferometer system with 60 independent simultaneous channels. The system was designed for demanding applications requiring passive, electrically immune sensors with an extremely long MTTF. In addition to providing better than 0.3nm measurement repeatability at 5KHz for all channels, the system demonstrated absolute distance uncertainty of less than 5nm over a 500 micron measurement range.

Citation Download Citation

Leslie L. Deck "High-performance multi-channel fiber-based absolute distance measuring interferometer system", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050E (21 August 2009); https://doi.org/10.1117/12.826253

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