Effect of solvent on morphological properties of TiOx thin film

Meng-Yueh Liu; Chih-Hua Chang; Chin-Hsiang Chang; Jing-Shun Huang; Chia-Shin Chao; Yu-Hong Lin; Wen-Han Lin; Ching-Fuh Lin

doi:10.1117/12.825421

20 August 2009 Effect of solvent on morphological properties of TiO_x thin film

Meng-Yueh Liu, Chih-Hua Chang, Chin-Hsiang Chang, Jing-Shun Huang, Chia-Shin Chao, Yu-Hong Lin, Wen-Han Lin, Ching-Fuh Lin

Author Affiliations +

Proceedings Volume 7396, Physical Chemistry of Interfaces and Nanomaterials VIII; 73960U (2009) https://doi.org/10.1117/12.825421
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

Sol-gel preparation of amorphous titanium oxide (TiO_x) thin films with distinct morphological properties on the hydrophobic substrate was obtained by solution spin coating method. The TiO_x thin films were deposited by three precursors using 2-methoxyethanol (2MOE), isopropanol (IPA) and mixture of 2MOE and hexane as solvents. We demonstrate evidence that the morphology of TiO_x thin film is strongly related to the employment of dissimilar solvent. Among these three solvents, TiO_x film obtained from 2MOE/hexane mixed solvent is a superior choice for the preparation of TiO_x thin film on the hydrophobic substrate because of its smooth surface morphology.

Citation Download Citation

Meng-Yueh Liu, Chih-Hua Chang, Chin-Hsiang Chang, Jing-Shun Huang, Chia-Shin Chao, Yu-Hong Lin, Wen-Han Lin, and Ching-Fuh Lin "Effect of solvent on morphological properties of TiO_x thin film", Proc. SPIE 7396, Physical Chemistry of Interfaces and Nanomaterials VIII, 73960U (20 August 2009); https://doi.org/10.1117/12.825421

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available