Optimal design and fabrication of ring resonator composed of Ge0[sub]2[/sub]-doped silica waveguides for IOG

Lijun Guo; Bangren Shi; Chen Chen; Hao Lv; Zhenming Zhao; Meng Zhao

doi:10.1117/12.834916

24 August 2009 Optimal design and fabrication of ring resonator composed of Ge0₂-doped silica waveguides for IOG

Lijun Guo, Bangren Shi, Chen Chen, Hao Lv, Zhenming Zhao, Meng Zhao

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73810Q (2009) https://doi.org/10.1117/12.834916
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

The ring resonator is the core sensing element in the resonant integration optical gyroscope (IOG) . Its performances influence the minimum resolution and the error items of gyroscope directly and it is the key of the design and manufacturing. This paper presents optimal design of ring resonator composed of Ge02 -doped silica waveguides fabricated on silicon substrates using wide angle beam propagation method (WA-BPM). The characteristic of the light propagating across the ring resonator is analyzed. According to the design results, we succeed in fabricating the ring resonator by Plasma Enhanced Chemical Vapor Deposition (PECVD) method and Reactive Ion Etching (RIE) technology. In order to characterize the ring resonator, an optical measurement setup is built, fiber laser line-width is 50 kHz, detector responsibility is 0.95A/W and integral time is 10s. By testing, propagation loss and total loss of ring resonator are 0.02dB/cm and 0.1dB/circuit respectively. Observed from the resonance curve, a finesse of 12.5.

Citation Download Citation

Lijun Guo, Bangren Shi, Chen Chen, Hao Lv, Zhenming Zhao, and Meng Zhao "Optimal design and fabrication of ring resonator composed of Ge0₂-doped silica waveguides for IOG", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73810Q (24 August 2009); https://doi.org/10.1117/12.834916

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