Instantaneous surface profile measurement using polarized phase-shifting

Terry Yuan-Fang Chen; Yi-Liang Du

doi:10.1117/12.839312

25 August 2009 Instantaneous surface profile measurement using polarized phase-shifting

Terry Yuan-Fang Chen, Yi-Liang Du

Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 73754M (2009) https://doi.org/10.1117/12.839312
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China

Abstract

In this paper, an instantaneous phase-shifting interferometer (IPSI) is constructed, based on polarized light, to capture interference fringe images with different phase shifting instantaneously, and to avoid the effect of surrounding environments. The phase value is calculated according to the intensity of the interferometer images, and the surface profile of specimen can be determined after phase unwrapping. In experiments, the interference images are captured simultaneously by using four CCD cameras and the position mismatch of the four images are corrected by using digital image correlation (DIC). Tests of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.03μ~0.05μm can be achieved, and the maximum error is about 0.1μm.

Citation Download Citation

Terry Yuan-Fang Chen and Yi-Liang Du "Instantaneous surface profile measurement using polarized phase-shifting", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73754M (25 August 2009); https://doi.org/10.1117/12.839312

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available