Study on surface topography of IBS oxide multilayer mirrors

Yong Chen; Xiao Zhang; Fan Shan; Boxiong Chen

doi:10.1117/12.828614

20 May 2009 Study on surface topography of IBS oxide multilayer mirrors

Yong Chen, Xiao Zhang, Fan Shan, Boxiong Chen

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72830R (2009) https://doi.org/10.1117/12.828614
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

The surface topography of oxide multilayer mirrors with Ion Beam Sputtering (IBS) technology is experimentally investigated by Atomic Force Microscope (AFM). Different film materials, substrates polishing and cleaning methods are experimented for promoting the mirrors quality, respectively. PSD (Power Spectral Density) characteristic of different substrates and films has been compared. Surface roughness with different polished methods has been analyzed too. The result shows that the depositional property of film materials determines the principal characteristic of mirror surface topography, and the substrate polishing and cleaning quality mostly affects the mirror optical quality.

Citation Download Citation

Yong Chen, Xiao Zhang, Fan Shan, and Boxiong Chen "Study on surface topography of IBS oxide multilayer mirrors", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72830R (20 May 2009); https://doi.org/10.1117/12.828614

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