Partially coherent image computation using elementary functions

Arlene Smith; Anna Burvall; Christopher Dainty

doi:10.1117/12.814072

16 March 2009 Partially coherent image computation using elementary functions

Arlene Smith, Anna Burvall, Christopher Dainty

Proceedings Volume 7274, Optical Microlithography XXII; 727434 (2009) https://doi.org/10.1117/12.814072
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

It is well-known that calculations of the propagation of partially coherent light, such as those required for the calculation of two-dimensional image intensities, involve four-dimensional functions. Recently, Wald et al [Proc SPIE, 59621G, 2005] outlined a method for reducing the four-dimensional problem to a purely twodimensional one. Instead of an exact modal expansion of the mutual coherence function or cross-spectral density, an approximate expansion is used, into what we call elementary functions. In this paper, rules of thumb are developed for fast and efficient computation of the image intensity in a simple partially coherent lithographic imaging system.

Citation Download Citation

Arlene Smith, Anna Burvall, and Christopher Dainty "Partially coherent image computation using elementary functions", Proc. SPIE 7274, Optical Microlithography XXII, 727434 (16 March 2009); https://doi.org/10.1117/12.814072

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available