Analysis of the effect of point-of-use filtration on microbridging defectivity

J. Braggin; R. Gronheid; S. Cheng; D. Van Den Heuvel; S. Bernard; P. Foubert; C. Rosslee

doi:10.1117/12.813471

1 April 2009 Analysis of the effect of point-of-use filtration on microbridging defectivity

J. Braggin, R. Gronheid, S. Cheng, D. Van Den Heuvel, S. Bernard, P. Foubert, C. Rosslee

Proceedings Volume 7273, Advances in Resist Materials and Processing Technology XXVI; 72730S (2009) https://doi.org/10.1117/12.813471
Event: SPIE Advanced Lithography, 2009, San Jose, California, United States

Abstract

Microbridging defects have emerged as one of the top yield detractor in semiconductor manufacturing as Moore's law drives towards 32nm processing utilizing immersion lithography. It is generally recognized that there are multiple root causes for microbridging defectivity. Image and resist contrast and different developer techniques have been studied and their contribution to microbridging defectivity has been described. In this study we will focus on the effect of point-ofuse filtration and how it is best used to mitigate microbridging defectivity. A design of experiment methodology will be utilized to understand the effect of various filter and filtration parameters on microbridging defectivity, including filter retention rating, filter media and design, filtration rate, and controlled filtration pressure. It is anticipated that by better understanding the effect of point-of-use filtration on microbridging defectivity, guidelines for better control of this type of defect may be formulated.

Citation Download Citation

J. Braggin, R. Gronheid, S. Cheng, D. Van Den Heuvel, S. Bernard, P. Foubert, and C. Rosslee "Analysis of the effect of point-of-use filtration on microbridging defectivity", Proc. SPIE 7273, Advances in Resist Materials and Processing Technology XXVI, 72730S (1 April 2009); https://doi.org/10.1117/12.813471

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available