Two-dimensional phononic crystal slab defect mode micromechanical resonators

Saeed Mohammadi; Ali A. Eftekhar; Abdelkrim Khelif; William D. Hunt; Ali Adibi

doi:10.1117/12.816990

16 February 2009 Two-dimensional phononic crystal slab defect mode micromechanical resonators

Saeed Mohammadi, Ali A. Eftekhar, Abdelkrim Khelif, William D. Hunt, Ali Adibi

Proceedings Volume 7223, Photonic and Phononic Crystal Materials and Devices IX; 72230H (2009) https://doi.org/10.1117/12.816990
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

By creating line defects cavities in the structure of a phononic crystal (PC) made by etching a hexagonal (honeycomb) array of holes in a 15μm-thick slab of silicon, high-Q PC resonators are fabricated and tested using a complimentary-metal- oxide-semiconductor-compatible process. The radii of the holes are approximately 6.4μm and the spacing between nearest holes is 15μm. We show that the complete phononic band gap of the PC structure supports resonant modes with quality factors of more than 6000 at frequencies as high as 126MHz in the resonator structure. The very good confinement of acoustic energy is achieved by using only a few PC layers confining the cavity region. The calculated frequencies of resonance of the structure using finite element method are in a very good agreement with the experimental data. The performance of these PC resonator structures makes them excellent candidates for wireless communication and sensing applications.

Citation Download Citation

Saeed Mohammadi, Ali A. Eftekhar, Abdelkrim Khelif, William D. Hunt, and Ali Adibi "Two-dimensional phononic crystal slab defect mode micromechanical resonators", Proc. SPIE 7223, Photonic and Phononic Crystal Materials and Devices IX, 72230H (16 February 2009); https://doi.org/10.1117/12.816990

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available