Characterization of ZnO thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of ZnO by metal organic chemical vapor deposition

David J. Rogers; F. Hosseini Teherani; C. Sartel; V. Sallet; F. Jomard; P. Galtier; M. Razeghi

doi:10.1117/12.817032

17 February 2009 Characterization of ZnO thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of ZnO by metal organic chemical vapor deposition

David J. Rogers, F. Hosseini Teherani, C. Sartel, V. Sallet, F. Jomard, P. Galtier, M. Razeghi

Author Affiliations +

Proceedings Volume 7217, Zinc Oxide Materials and Devices IV; 72170F (2009) https://doi.org/10.1117/12.817032
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.

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David J. Rogers, F. Hosseini Teherani, C. Sartel, V. Sallet, F. Jomard, P. Galtier, and M. Razeghi "Characterization of ZnO thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of ZnO by metal organic chemical vapor deposition", Proc. SPIE 7217, Zinc Oxide Materials and Devices IV, 72170F (17 February 2009); https://doi.org/10.1117/12.817032

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