Novel MWIR microspectrometer based on a tunable detector

Norbert Neumann; Martin Ebermann; Steffen Kurth; Karla Hiller

doi:10.1117/12.816578

23 February 2009 Novel MWIR microspectrometer based on a tunable detector

Norbert Neumann, Martin Ebermann, Steffen Kurth, Karla Hiller

Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 72080D (2009) https://doi.org/10.1117/12.816578
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

In this paper we present basic designs, operation concepts and some application examples of a novel microspectrometer for the spectral range of 3-5μm, which is based on a pyroelectric detector with an integrated micromachined Fabry-Perot filter (FPF). We discuss the influence of different optical setups on the spectral resolution and the signal-to-noise ratio of the microspectrometer. Two basic operation modes, step scan mode and continuous sweep mode are demonstrated. Such a device has a large potential in the field of infrared absorption spectroscopy, particularly if multicomponent mixtures have to be analyzed.

Citation Download Citation

Norbert Neumann, Martin Ebermann, Steffen Kurth, and Karla Hiller "Novel MWIR microspectrometer based on a tunable detector", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080D (23 February 2009); https://doi.org/10.1117/12.816578

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