Diffraction gratings for compact integrated optical structures

Ildar Salakhutdinov; Gregory W. Auner

doi:10.1117/12.809029

24 February 2009 Diffraction gratings for compact integrated optical structures

Proceedings Volume 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II; 72050O (2009) https://doi.org/10.1117/12.809029
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

Diffraction gratings used in various applications for compact optical devices. We used different technologies for this task: deep-UV lithography, FIB milling, e-beam lithography, and hot embossing/nanoimprinting technology. We analyzed advantages and disadvantages of each fabrication technology.

Citation Download Citation

Ildar Salakhutdinov and Gregory W. Auner "Diffraction gratings for compact integrated optical structures", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 72050O (24 February 2009); https://doi.org/10.1117/12.809029

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