Nanorod measurement-layer separate structure for nanorod-character measurement, simulation, and application as sensor devices

Myoung-Kun Leem; Jin-Uk Park; Chang-Man Kim; Kyu-Jin Kim; Se-Hyuk Yeom; Woo-Youp Choi; Won-Seok Kang; Jae-Ho Kim; Shin-Won Kang

doi:10.1117/12.808673

23 February 2009 Nanorod measurement-layer separate structure for nanorod-character measurement, simulation, and application as sensor devices

Myoung-Kun Leem, Jin-Uk Park, Chang-Man Kim, Kyu-Jin Kim, Se-Hyuk Yeom, Woo-Youp Choi, Won-Seok Kang, Jae-Ho Kim, Shin-Won Kang

Author Affiliations +

Proceedings Volume 7204, Micromachining and Microfabrication Process Technology XIV; 72040P (2009) https://doi.org/10.1117/12.808673
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

This paper reported the simple nanorod characteristic measurement method by layer separated structure. The structures are designed by the ANSYS simulation and they are fabricated by semiconductor fabrications. In the experiment, dielectrophoresis (DEP) principle is used to assemble nanorods which are synthesized by electrochemical deposition (ECD) method. However, it is difficult to make devices without assembly process because nanorods which are synthesized by the ECD method are dispersed in the medium. Therefore, this paper was studied to design and fabricate the nanorod assembly-layer and measurement-layer separation. After assembling the nanorods, I-V characteristics of the nanorods were measured.

Citation Download Citation

Myoung-Kun Leem, Jin-Uk Park, Chang-Man Kim, Kyu-Jin Kim, Se-Hyuk Yeom, Woo-Youp Choi, Won-Seok Kang, Jae-Ho Kim, and Shin-Won Kang "Nanorod measurement-layer separate structure for nanorod-character measurement, simulation, and application as sensor devices", Proc. SPIE 7204, Micromachining and Microfabrication Process Technology XIV, 72040P (23 February 2009); https://doi.org/10.1117/12.808673

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