Sharpened transparent micronozzle fabrication for cell membrane piercing

E. M. Campo; M. J. Lopez-Martinez; E. Fernández; E. Ibañez; L. Barros; C. Nogues; J. Esteve; J. A. Plaza

doi:10.1117/12.809427

23 February 2009 Sharpened transparent micronozzle fabrication for cell membrane piercing

E. M. Campo, M. J. Lopez-Martinez, E. Fernández, E. Ibañez, L. Barros, C. Nogues, J. Esteve, J. A. Plaza

Proceedings Volume 7204, Micromachining and Microfabrication Process Technology XIV; 720407 (2009) https://doi.org/10.1117/12.809427
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

Sharpened cantilevered nozzles were fabricated combining microsystem technologies and focused ion beam micromachining. Micronozzles consist of silicon chips with silicon oxide microchannels whose micronozzles were reshaped using Focused Ion Beam. Micronozzle body was defined by an aluminum sacrificial layer patterned over a silicon wafer. This layer was surrounded by a deposited silicon oxide structural layer. The chip is defined by a silicon deep reactive ion etching through the wafer. This process releases part of the metal line forming a cantilevered micronozzle. Sharp reshaped micronozzles were achieved by focused ion beam milling. Mechanical tests of silicon oxide nozzles still containing the aluminum sacrificial layer were performed by cell piercing. In some instances, zona pellucida and membrane were crossed without cell lysis, and micronozzles remained intact.

Citation Download Citation

E. M. Campo, M. J. Lopez-Martinez, E. Fernández, E. Ibañez, L. Barros, C. Nogues, J. Esteve, and J. A. Plaza "Sharpened transparent micronozzle fabrication for cell membrane piercing", Proc. SPIE 7204, Micromachining and Microfabrication Process Technology XIV, 720407 (23 February 2009); https://doi.org/10.1117/12.809427

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