Paper
19 February 2009 Scanner deflection of top-hat converted single-mode lasers for cost-effective micro-machining at highest quality
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Abstract
Direct laser patterning of various materials is today widely used in several micro-system production lines like inkjet printing, solar cell technology, flat-panel display production and medicine. Typically single-mode solid state lasers and their higher harmonics are used especially for machining of holes and grooves. The most prominent lasers are pulsed Nd:YAG lasers and their harmonics @ 266, 355 and 532 nm. Recently, the striking advantages of flat top intensity distributions for the efficiency and quality of these processes were demonstrated. The use of LIMO's compact Gaussian-to- top-hat converter enables the creation of steeper and sharper edges. Additionally, the higher energy efficiency of rectangular top hat profiles compared to smooth, circular Gaussian shapes allows for faster patterning. A standard method to reduce process times is the use of optical scanning systems. Yet, the application of Gaussian-to-top-hat converters in combination with a scanner was hindered by distortions of the top hat introduced by the F-Theta focussing lens of the scanners even at very small deflection angles (<2°). We solved this challenge by implementing an alternative scanning approach (patent pending). Scanning results obtained with a 50x50μm2 top hat field (homogeneity down to <10%) in a scan area of 156x156mm2 will be presented. The minimal distortions of the top hat observed within the scan area make LIMO's compact Gaussian-to-top-hat converter excellently suited for industrial scanning applications, e.g. for the processing of solar panels.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
B. Guetlich, T. Mitra, F. Toennissen, O. Homburg, and L. Aschke "Scanner deflection of top-hat converted single-mode lasers for cost-effective micro-machining at highest quality", Proc. SPIE 7194, Laser Resonators and Beam Control XI, 71940A (19 February 2009); https://doi.org/10.1117/12.808163
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KEYWORDS
Gaussian beams

Micromachining

Beam shaping

Nd:YAG lasers

Optical lithography

Scanners

3D scanning

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