Optical detection of concentrations for mixed acid: HF and HNO3

Gumin Kang; Kyoungsik Kim

doi:10.1117/12.809955

13 February 2009 Optical detection of concentrations for mixed acid: HF and HNO₃

Gumin Kang, Kyoungsik Kim

Proceedings Volume 7183, Multiphoton Microscopy in the Biomedical Sciences IX; 71832A (2009) https://doi.org/10.1117/12.809955
Event: SPIE BiOS, 2009, San Jose, California, United States

Abstract

Mixed acid, which consist of HF and HNO₃, is used as a good etchant for silicon dioxide in the wet etching and pickling process of stainless steel. The optical detection of concentration for such mixed acids is crucial to optimize and cut costs in the manufacturing process. Optical detection in the IR regime has been utilized to measure the concentration of the mixed acid for HF and HNO₃, because that has several strong absorption peaks, which is contributed by vibrational mode of each acid molecular in this spectrum. In this research, we observed the concentrations of mixed acid to consist of HF and HNO₃, as we measured the absorption intensity of OH- stretch and NO₃ - stretch band by optical spectroscopy. The concentration range of HF over 1.5-3 wt% and that of HNO3 over 2-10 wt% were studied in room temperature.

Citation Download Citation

Gumin Kang and Kyoungsik Kim "Optical detection of concentrations for mixed acid: HF and HNO₃", Proc. SPIE 7183, Multiphoton Microscopy in the Biomedical Sciences IX, 71832A (13 February 2009); https://doi.org/10.1117/12.809955

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