Paper
28 January 2009 A new five degree-of-freedom measurement method and system
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Abstract
In this paper, a newly developed system for simultaneously measuring five-degree-of-freedom errors of machine tools is introduced. A single-mode fiber-coupled laser module is used to eliminate the beam drift of the laser source. Only a cube corner retro-reflector and a beam splitter are adopted in the moving target in order to sense the straightness errors and angle errors (pitch and yaw) respectively and simultaneously. A special prism (including a beam-splitter facet and an all-reflecting facet) was adopted to measure the roll. A simple common-path compensation method for laser beam drift is put forward, and a 2D position-sensitive detector and a lens are used to monitor angular drift of the laser beam. It is convenient to measure the parameters of the numerical control machine in workshop due to non-cable connecting between moving target and measurement head. The error analysis and theory analysis of roll which provide potent theoretical guidance in the future are given in detail.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fengling You, Qibo Feng, and Bin Zhang "A new five degree-of-freedom measurement method and system", Proc. SPIE 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments, 715634 (28 January 2009); https://doi.org/10.1117/12.811951
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Prisms

Sensors

Error analysis

Laser systems engineering

Beam splitters

Mirrors

Collimation

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