Measurement of micro-hole with high aspect ratio by double optical fibers coupling

Jiwen Cui; Jiubin Tan; Fei Wang; Chuanxi Song

doi:10.1117/12.813972

12 January 2009 Measurement of micro-hole with high aspect ratio by double optical fibers coupling

Jiwen Cui, Jiubin Tan, Fei Wang, Chuanxi Song

Proceedings Volume 7133, Fifth International Symposium on Instrumentation Science and Technology; 713325 (2009) https://doi.org/10.1117/12.813972
Event: International Symposium on Instrumentation Science and Technology, 2008, Shenyang, China

Abstract

In order to measure the geometry of a micro-hole with high aspect ratio, we made the light coming out from the laser to transmit in the reversal direction by double optical fibers coupling, modeled both the energy distribution at the end of an optical fiber and the output of CCD, used zernike moment subpixel algorithm to locate the edge of an image and a compensation algorithm to improve the precision of edge location. The effectiveness of the method newly developed is verified through experiments. Experimental results indicate that the newly developed method can be used to measure the geometry of a blind hole of 2.0mm depth with a diameter of about 0.2mm using a double frequency interferometer with a repeatability uncertainty of less than 0.4m.

Citation Download Citation

Jiwen Cui, Jiubin Tan, Fei Wang, and Chuanxi Song "Measurement of micro-hole with high aspect ratio by double optical fibers coupling", Proc. SPIE 7133, Fifth International Symposium on Instrumentation Science and Technology, 713325 (12 January 2009); https://doi.org/10.1117/12.813972

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