A robust control scheme of nanopositioning driven by ultrasonic motor

Fang Cheng; Kuang-Chao Fan; Ye-tai Fei

doi:10.1117/12.819598

31 December 2008 A robust control scheme of nanopositioning driven by ultrasonic motor

Fang Cheng, Kuang-Chao Fan, Ye-tai Fei

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71301O (2008) https://doi.org/10.1117/12.819598
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

An innovative nanopositioning control system is proposed in this paper. A commercial ultrasonic motor (Nanomotion Co. model HR4) is employed to generate 3-mode motions of different scales. A multi-scale positioning control scheme can thus been developed by integrating the 3 driving modes. A new displacement sensor LDGI (Linear Diffraction Grating Interferometer) is developed and served as the displacement feedback. The uncertainty of LDGI system has been proved less than 10nm in 15mm. By phase subdivision technique the resolution of LDGI can be interpolated to 0.25nm. With this hardware system a software-based controller is developed. A self-tuning module, called Back Propagation Neural Network (BPNN), is added to a PID control loop. This self-tuning PID controller shows more robust than conventional ones, especially when some unpredictable disturbance occurs. Experiments show that this system is able to reach the steady state in 2 seconds without notable overshoot or vibration and hold the position for a long time with the positioning error less than 3nm. When some disturbances occur the system can build a new steady state in 2 seconds.

Citation Download Citation

Fang Cheng, Kuang-Chao Fan, and Ye-tai Fei "A robust control scheme of nanopositioning driven by ultrasonic motor", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71301O (31 December 2008); https://doi.org/10.1117/12.819598

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available