Subdivision circuit design for nanometer grating based second order moire fringe

Xiushui Ma; Shenwang Lin; Xiaoqi He; Rusheng Yan; Yetai Fei; Wei Zu

doi:10.1117/12.819568

31 December 2008 Subdivision circuit design for nanometer grating based second order moire fringe

Xiushui Ma, Shenwang Lin, Xiaoqi He, Rusheng Yan, Yetai Fei, Wei Zu

Proceedings Volume 7130, Fourth International Symposium on Precision Mechanical Measurements; 71300V (2008) https://doi.org/10.1117/12.819568
Event: Fourth International Symposium on Precision Mechanical Measurements, 2008, Anhui, China

Abstract

Two groups of indicated grating and scale grating produce two groups of first order Moire fringe. Two groups of first order Moire fringe interfere and produce second order Moire fringe, and then we can use the four-phase photoelectric sensors to get two channels of enlarged second order Moire fringe's sine wave signal, their phase difference is π/2. Based on chips of QA740204 and QA740210, this paper designs the 20 times subdivide circuit to achieve the nano-measurement resolution and when the grating's move speed closes to the limit value or exceeding the limit value, the critical state alert and overspeed alert circuit can be provided in measuring.

Citation Download Citation

Xiushui Ma, Shenwang Lin, Xiaoqi He, Rusheng Yan, Yetai Fei, and Wei Zu "Subdivision circuit design for nanometer grating based second order moire fringe", Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300V (31 December 2008); https://doi.org/10.1117/12.819568

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