Characterizing OPC model accuracy versus lens induced polarization effects in hyper NA immersion lithography

Tamer M. Tawfik; Edita Tejnil

doi:10.1117/12.801516

17 October 2008 Characterizing OPC model accuracy versus lens induced polarization effects in hyper NA immersion lithography

Tamer M. Tawfik, Edita Tejnil

Author Affiliations +

Proceedings Volume 7122, Photomask Technology 2008; 712245 (2008) https://doi.org/10.1117/12.801516
Event: SPIE Photomask Technology, 2008, Monterey, California, United States

Abstract

Immersion lithography is extending the lifetime of optical lithography by enabling numerical aperture (NA) greater than unity. Along with scanner hardware improvements, modeling of hyper-NA lithography systems for optical proximity correction (OPC) is also continuing to be necessary in improving photolithography capability. With the use of hyper-NA immersion lithography and polarized illumination, the assumption of scalar optical pupil in optical system modeling may no longer be valid. To fully describe the transmission of any polarization state through the optical system, Jones matrix is necessary. It has been shown that Jones matrix can be described as a combination of apodization loss, birefringence, diattenuation, scalar phase aberrations, and rotation effects. In this work, the impact of such effects on calibration and accuracy of OPC models is characterized in terms of the model fit quality, model predictability, and changes to OPC results.

Citation Download Citation

Tamer M. Tawfik and Edita Tejnil "Characterizing OPC model accuracy versus lens induced polarization effects in hyper NA immersion lithography", Proc. SPIE 7122, Photomask Technology 2008, 712245 (17 October 2008); https://doi.org/10.1117/12.801516

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available