Adaptive automatic fragmentation

Mohamed Serag El-Din Habib

doi:10.1117/12.801508

17 October 2008 Adaptive automatic fragmentation

Mohamed Serag El-Din Habib

Proceedings Volume 7122, Photomask Technology 2008; 712243 (2008) https://doi.org/10.1117/12.801508
Event: SPIE Photomask Technology, 2008, Monterey, California, United States

Abstract

As more aggressive Resolution Enhancement Techniques (RET) are applied, the problem of correctly fragmenting edges of an OPC mask is becoming more complex. OPC recipes contain more lines devoted to control of fragmentation than anything else. This paper introduces a new Automatic Adaptive Fragmentation method that decreases the complexity of OPC recipes while providing the same or better quality of results. The adaptive fragmentation is guided by just a few simple rules that provide flexible fragmentation while adhering to mask manufacturing rule constraints.

Citation Download Citation

Mohamed Serag El-Din Habib "Adaptive automatic fragmentation", Proc. SPIE 7122, Photomask Technology 2008, 712243 (17 October 2008); https://doi.org/10.1117/12.801508

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