Paper
19 August 2008 Micro-shutter developments for IR applications
Author Affiliations +
Abstract
This paper will investigate micro-shutter developments for IR applications. By demonstrating a interrupter mechanism MEMS design, we will show how to implement a micro-shutter technology to enable adaptive coded aperture imaging and non-imaging systems. The use of Photonic MEMS for creating adaptive coded apertures, for surveillance systems, has been gaining momentum since 2007 1,2. Through the investigation of the interrupter mechanism 3,4, we will demonstrate a novel approach for IR applications. This paper discusses challenges and opportunities that may arise from the fabrication of a MEMS interrupter mechanism. We discuss the characterization of the micro-shutter to include mechanical, electrical and IR properties. The "open and close" speeds of the micro-shutter device will also be assessed from a scaling perspective to determine usability through modeling and simulation.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
LaVern A. Starman, Derrick Langley, and Stanley Rogers "Micro-shutter developments for IR applications", Proc. SPIE 7096, Adaptive Coded Aperture Imaging and Non-Imaging Sensors II, 70960K (19 August 2008); https://doi.org/10.1117/12.801177
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Cited by 3 scholarly publications.
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KEYWORDS
Actuators

Microelectromechanical systems

Data modeling

Resistance

Instrument modeling

Infrared imaging

Oxides

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