Closed-loop high-precision position control system with two modes

Cheng-liang Ge; Guo-bin Fan; Zhi-wei Huang; Zhi-qiang Liu; Zhen-dong Li; Jian-tao Wu; Min Wan; Xiao-yang Hu; Zheng Liang

doi:10.1117/12.792317

2 September 2008 Closed-loop high-precision position control system with two modes

Cheng-liang Ge, Guo-bin Fan, Zhi-wei Huang, Zhi-qiang Liu, Zhen-dong Li, Jian-tao Wu, Min Wan, Xiao-yang Hu, Zheng Liang

Author Affiliations +

Proceedings Volume 7068, Optical System Alignment and Tolerancing II; 70680O (2008) https://doi.org/10.1117/12.792317
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

Based on fine optical grating and micrometer, one closed-loop high-precision position control system with two modes has been made. The system is used to control the optical elements moving in two ways. That is, one control mode is automatically control with optical grating feedback system and the other mode is manually control with micrometer. Under the support of conservative PID control algorithm, the precision of the system is up to ±0.1&mgr;m while operating on automatically way, otherwise, the position precision is ±1&mgr;m.

Citation Download Citation

Cheng-liang Ge, Guo-bin Fan, Zhi-wei Huang, Zhi-qiang Liu, Zhen-dong Li, Jian-tao Wu, Min Wan, Xiao-yang Hu, and Zheng Liang "Closed-loop high-precision position control system with two modes", Proc. SPIE 7068, Optical System Alignment and Tolerancing II, 70680O (2 September 2008); https://doi.org/10.1117/12.792317

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available