Paper
11 August 2008 Optical wavefront sensor based on sub-wavelength metallic structures
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Abstract
Lateral shearing interferometers (LSIs) are efficient tools for optical analysis. They allow classical optical wave-front aberrations measurements as well as the precise evaluation of abrupt steps. The basic element of an LSI is the transmittance grating, which diffracts a number of orders (two in the case of a mono-dimensional LSI, ideally three or four non coplanar orders in the case of bi-dimensional LSI). This brings the need for specifically designed transmittance gratings. For instance, a mono-dimensional LSI needs a sinusoidal-shaped transmittance, since its Fourier transform carries exactly 2 orders. Such transmittances are however either impossible or at least extremely costly to design using classical macroscopic techniques, mainly because the usual thin film deposition techniques require several technological steps, in order to get the desired light filtering effect. Given these constraints, we made use of sub-wavelength structures in order to build a new class of LSI. They are made of sub-wavelength lamellar metallic gratings specifically designed for the mid-infrared, and allow the precise coding of the desired transmission shape all over the LSI grating.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Riad Haïdar, Bruno Toulon, Grégory Vincent, Stéphane Collin, Sabrina Velghe, Jérôme Primot, and Jean-Luc Pelouard "Optical wavefront sensor based on sub-wavelength metallic structures", Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 706309 (11 August 2008); https://doi.org/10.1117/12.795082
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KEYWORDS
Transmittance

Optical design

Etching

Interferometers

Metals

Mid-IR

Optical analysis

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