Coarse frequency comb interferometry

J. Schwider

doi:10.1117/12.793221

11 August 2008 Coarse frequency comb interferometry

J. Schwider

Proceedings Volume 7063, Interferometry XIV: Techniques and Analysis; 706304 (2008) https://doi.org/10.1117/12.793221
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

Real wedge interferometers of the Fizeau-type do not allow for fringes in case of a spectral broad band source - or in short: for white light fringes. Here, the use of a suitable frequency comb source will help to overcome this limitation on the one hand and on the other will offer the capability for enhanced phase sensitivity in high precision measurements of surface deviations. Frequency combs can be produced either by using a pulse train from a fs-laser or by passive filtering of the light emitted by a broad band source as a superlum-diode or a fs-laser. The frequency comb produced by a common fs-laser is extremely fine, i.e., the frequency difference of consecutive peaks is very small or the distance of consecutive pulses of the pulse train might be of the order of 1m. Therefore, the coarse pulse train produced by passive filtering of a broad band source is better adapted to the needs of surface testing interferometers. White light fringes are either applied for the profiling of discontinuous surfaces and/or can serve as an indication for the correct choice of multiplication factors in superposition interferometry. During the last decennium it became more and more clear that spatially incoherent sources provide better measuring accuracy in surface measurements due to the reduced influence of dust diffraction patterns. The advantage of laser illumination can nevertheless be maintained if the laser light is made spatially incoherent through moving scatterers in the light path. Here, we will discuss the application of spatially incoherent broad band light frequency filtered through a Fabry-Perot filter. The main applications are in the following fields: (1) surface profiling applications using two-beam Fizeau interferometers, (2) selection of single cavities out of a series of interlaced cavities, and (3) sensitivity enhancement for multi-beam interferometers for planeness or sphericity measurements. Some of the discussed possibilities will be experimentally demonstrated.

Citation Download Citation

J. Schwider "Coarse frequency comb interferometry", Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 706304 (11 August 2008); https://doi.org/10.1117/12.793221

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available