Metrology at the nanoscale: what are the grand challenges?

Kevin W. Lyons; Michael T. Postek

doi:10.1117/12.798004

9 September 2008 Metrology at the nanoscale: what are the grand challenges?

Kevin W. Lyons, Michael T. Postek

Proceedings Volume 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II; 704202 (2008) https://doi.org/10.1117/12.798004
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

Nanometrology provides the means to measure and characterize nanometer scale process and product performance and covers an expanse of topics including instrumentation, measurement methods (off-line and in-process applications), and standards. To meet the needs of the emerging integrated manufacturing community it is important that research on scale-up of nanotechnology for high-rate production, reliability, robustness, yield, efficiency and cost issues for manufactured products and services be pursued. To achieve this, new research directions must include a systems approach that encompasses the characterization of instrumentation, three dimensional metrology, and production-hardened metrology. To illustrate the value of metrology and the role of standards to facilitate product realization, a number of National Nanotechnology Initiative (NNI) sponsored workshops have been organized. This paper provides an overview of some key findings and recommendations identified at two nanomanufacturing workshops held in 2004 and 2006 that were focused on metrology, instrumentation, and standards.

Citation Download Citation

Kevin W. Lyons and Michael T. Postek "Metrology at the nanoscale: what are the grand challenges?", Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 704202 (9 September 2008); https://doi.org/10.1117/12.798004

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