Ultra-high resolution Raman imaging by optically trapped dielectric microsphere

Z. X. Shen; Johnson Kasim

doi:10.1117/12.794692

28 August 2008 Ultra-high resolution Raman imaging by optically trapped dielectric microsphere

Z. X. Shen, Johnson Kasim

Proceedings Volume 7033, Plasmonics: Nanoimaging, Nanofabrication, and Their Applications IV; 70330E (2008) https://doi.org/10.1117/12.794692
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

We show a different approach to perform near-field Raman imaging with sub-diffraction limit spatial resolution. In this approach, a dielectric microsphere is trapped by the excitation laser through optical tweezers technique. The microsphere is used to focus the laser to the sample, and also to collect the scattered Raman signals. We show the capability of this method in imaging various types of samples, such as device sample with 45 nm poly-Si gates with SiGe stressors and gold nanopatterns. This method is easy to perform, has better repeatability, and generates stronger signal as compared to the conventional near-field Raman techniques.

Citation Download Citation

Z. X. Shen and Johnson Kasim "Ultra-high resolution Raman imaging by optically trapped dielectric microsphere", Proc. SPIE 7033, Plasmonics: Nanoimaging, Nanofabrication, and Their Applications IV, 70330E (28 August 2008); https://doi.org/10.1117/12.794692

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