29 April 2008
Effect of quartz window temperature on plasma composition during STI etch
E. V. Danilkin, D. Shamiryan, M. R. Baklanov, A. P. Milenin, W. Boullart, G. Y. Krasnikov, O. P. Gutshin, A. I. Mochalov
Author Affiliations +
E. V. Danilkin,1,2,3 D. Shamiryan,1 M. R. Baklanov,1 A. P. Milenin,1 W. Boullart,1 G. Y. Krasnikov,2 O. P. Gutshin,2 A. I. Mochalov3
1IMEC vzw (Belgium)
2MIKRON (Russia)
3Moscow Institute of Electronic Technology (Russia)