A compound microfluidic device with integrated optical waveguides

Timo Mappes; Jürgen Mohr; Kristin Mandisloh; Mauno Schelb; Benjamin Ross

doi:10.1117/12.781820

14 May 2008 A compound microfluidic device with integrated optical waveguides

Timo Mappes, Jürgen Mohr, Kristin Mandisloh, Mauno Schelb, Benjamin Ross

Proceedings Volume 6992, Micro-Optics 2008; 69920L (2008) https://doi.org/10.1117/12.781820
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

The integration of optical components in microfluidic devices is an emerging issue for downscaling analytical processes to lab-on-a-chip systems. Our approach is to build a one compound polymer system, which combines optical waveguides with microfluidic channels in one monolithic device. In addition the entire chip shall be optimized to use optical interfaces only. The processing of channels and waveguides is based on photodegradation of PMMA through deep ultraviolet (DUV) radiation in both cases. In a first step, microfluidic trenches with a depth of 5 μm are structured by DUV lithography with a subsequent developing process dissolving the exposed material. Waveguides, geometrically crossing the channel, get implemented by a second DUV lithography step. In a last step, the transparent optofluidic devices are covered to form channels and sealed with a second PMMA substrate by thermal bonding. The process was optimized to achieve leakage free channels without any disturbance of the waveguide behaviour. The paper discusses the manufacturing process and shows experimental results that serve as preparation for ongoing simulations for sensing applications. In first experiments the optical attenuation of the waveguides decreased by 1.2 dB at a wavelength of λ = 638 nm, when the empty channels were filled with deionised water which corresponds to a change in the refractive index of 0.33.

Citation Download Citation

Timo Mappes, Jürgen Mohr, Kristin Mandisloh, Mauno Schelb, and Benjamin Ross "A compound microfluidic device with integrated optical waveguides", Proc. SPIE 6992, Micro-Optics 2008, 69920L (14 May 2008); https://doi.org/10.1117/12.781820

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available