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Au colloids were synthesized using NaBH4 or Na3-sitrate with ethanol as solvent and nano-Au thin films were built up
by the electrostatic self-assembly technique. The self-assembled polyaniline (PAN) and poly (styrenesulfonic acid)
(PSSA) composite films (PAN/PSSA) were obtained by doping-induced deposition effect above the nano-Au film
surface. A novel chemical field-effect transistor (ChemFET) gas sensor was designed and fabricated with PAN/PSSA
composite films deposited on the gate area of MOSFET replacing the gate metal, and the gas-sensing properties of the
ChemFET sensor to NO2 was examined. The effects of the back-surface voltage and the channel length/width of
ChemFET sensor on the gas-sensing characteristics were investigated. The results showed that Au colloids synthesized
using ethanol as solvent was a monodisperse suspension and had more uniform distribution, and the PAN/PSSA
composite film on the nano-Au film surface was uniform and firm. The optimum response of the ChemFET sensor could
be obtained when the channel length and the ratio of channel width to channel length were 10μm and 10, respectively.
Yadong Jiang,Huiling Tai,Guangzhong Xie, andJunsheng Yu
"Fabrication and NO2 sensing properties of ChemFET sensors with self-assembly PAN/PSSA sensitive films based on nano-Au surface", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843Q (11 March 2008); https://doi.org/10.1117/12.792244
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Yadong Jiang, Huiling Tai, Guangzhong Xie, Junsheng Yu, "Fabrication and NO2 sensing properties of ChemFET sensors with self-assembly PAN/PSSA sensitive films based on nano-Au surface," Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843Q (11 March 2008); https://doi.org/10.1117/12.792244