Properties of compositionally graded (Pb,Sr)TiO3 thin films for tunable microwave device application

Dongyi Zhou; Wenbiao Wu; Dengren Jin; Jinrong Cheng; Zhongyan Meng

doi:10.1117/12.792402

11 March 2008 Properties of compositionally graded (Pb,Sr)TiO₃ thin films for tunable microwave device application

Dongyi Zhou, Wenbiao Wu, Dengren Jin, Jinrong Cheng, Zhongyan Meng

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69841B (2008) https://doi.org/10.1117/12.792402
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Multilayered (Pb_1-xSr_x)TiO₃ thin films consisted of uniform PST(x) and sandwich-like compositionally graded PST80- 60-80 were fabricated on Pt/Ti/SiO₂/Si substrates by coating the solutions with different Sr contents(60≤Sr(mol%)≤80), respectively. Their structural and dielectric properties were investigated. Both uniform and compositionally graded films crystallized into a perovskite structure with no second phase found after post-deposition annealing. Among uniform films, the PST60 films showed the highest dielectric constant and tunability, but low figure of merit(FOM) due to relatively higher dielectric loss. For the sake of bringing down the dielectric loss, the PST60 thin films were sandwiched by PST80 thin layer, resulting in a decrease in dielectric loss and slight decrease in tunability. Besides the improvement of FOM, the temperature stability of graded PST80-60-80 thin films was also enhanced.

Citation Download Citation

Dongyi Zhou, Wenbiao Wu, Dengren Jin, Jinrong Cheng, and Zhongyan Meng "Properties of compositionally graded (Pb,Sr)TiO₃ thin films for tunable microwave device application", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69841B (11 March 2008); https://doi.org/10.1117/12.792402

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