Simulation of surface effects in energy dissipation of ultra-high-frequency (UHF) nanocantilevers

Kun Yan; Ai-Kah Soh

doi:10.1117/12.775386

3 April 2008 Simulation of surface effects in energy dissipation of ultra-high-frequency (UHF) nanocantilevers

Kun Yan, Ai-Kah Soh

Proceedings Volume 6926, Modeling, Signal Processing, and Control for Smart Structures 2008; 69260X (2008) https://doi.org/10.1117/12.775386
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

Devices composed of nanoelectromechanical systems (NEMS) possess distinguished properties which make them quite suitable for a variety of applications including ultra-high-frequency (UHF) resonators. However, most GHz resonators have low quality factor even though it has been well above 10³ ~ 10⁵ for very-high-frequency (VHF) microresonators. The motivation for our investigation of single crystal silicon nanoresonator arises from both its technological importance and its extraordinary surface effects. Our simulation results show that the quality factor decreased in a nearly linear manner as the surface area to volume ratio (SVR) was increased, which suggests that surface losses play a significant role in determining the quality factor of nanoresonators.

Citation Download Citation

Kun Yan and Ai-Kah Soh "Simulation of surface effects in energy dissipation of ultra-high-frequency (UHF) nanocantilevers", Proc. SPIE 6926, Modeling, Signal Processing, and Control for Smart Structures 2008, 69260X (3 April 2008); https://doi.org/10.1117/12.775386

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available