Shaped beam technique using a novel 3rd-order imaging approach

Tadashi Kotsugi; Takashi Fuse; Hidetoshi Kinoshita; N. William Parker

doi:10.1117/12.771753

20 March 2008 Shaped beam technique using a novel 3rd-order imaging approach

Tadashi Kotsugi, Takashi Fuse, Hidetoshi Kinoshita, N. William Parker

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69211V (2008) https://doi.org/10.1117/12.771753
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

We investigate a new technique for high current density beam formation called 3rd order imaging. This technique has two advantages: 1) increasing the beam current without beam blurring, and 2) producing a desired beam shape, such as a square or rectangle. Thus, it can significantly decrease writing times in Electron Beam Direct Writing (EBDW). These advantages are realized by using a patterned beam-defining aperture (PBDA) whose patterned openings work with the spherical aberration in the objective lens to generate the final beam shape. The PBDA transmits rays if they fall within the desired shape at the wafer, while blocking rays which would fall outside the desired shape. We have obtained beam line profiles and two-dimensional beam shapes experimentally. The 3rd-order imaging beam current density is seven times larger than that of a beam shaped by the conventional aperture. The experimental beam profile and the calculated result are in good agreement. The experimental two-dimensional shapes reproduce the calculated beam shapes, thereby verifying the theory of 3rd-order imaging. This technique is a potential solution to break through the technological impasse of high current density versus high resolution.

Citation Download Citation

Tadashi Kotsugi, Takashi Fuse, Hidetoshi Kinoshita, and N. William Parker "Shaped beam technique using a novel 3rd-order imaging approach", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69211V (20 March 2008); https://doi.org/10.1117/12.771753

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available