Design, fabrication, and integration of HIC glass waveguides on a silicon platform

Juejun Hu; Nathan Carlie; Ning-Ning Feng; Laeticia Petit; Anu Agarwal; Kathleen Richardson; Lionel Kimerling

doi:10.1117/12.763588

12 February 2008 Design, fabrication. and integration of HIC glass waveguides on a silicon platform

Juejun Hu, Nathan Carlie, Ning-Ning Feng, Laeticia Petit, Anu Agarwal, Kathleen Richardson, Lionel Kimerling

Proceedings Volume 6896, Integrated Optics: Devices, Materials, and Technologies XII; 68960Z (2008) https://doi.org/10.1117/12.763588
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

We demonstrate Si-CMOS-compatible lift-off fabrication of chalcogenide glass waveguides monolithically integrated on a silicon platform. As a novel route of glass film patterning, lift-off allows several benefits: leverage with Si-CMOS process compatibility; ability to fabricate single-mode waveguides with core sizes down to submicron range; reduced sidewall roughness; and wide applicability to other non-silica glass compositions. High-index-contrast (HIC) single-mode strip waveguides have been fabricated with from several glass target compositions including Ge₂₃Sb₇S₇₀, As₂S₃, As₃₆Ge₆S₅₈, As₃₆Sb₆S₅₈ and TeO₂. We measured Ge-Sb-S waveguides with low loss and excellent wafer-scale uniformity. We have experimentally demonstrated propagation loss reduction via graded-index (GRIN) cladding layers in HIC glass waveguides. These efforts have shown that scattering loss arising from sidewall roughness can be significantly reduced without compromising the high-index-contrast condition by inserting thin GRIN cladding layers with refractive indices intermediate between the core and topmost cover of a strip waveguide.

Citation Download Citation

Juejun Hu, Nathan Carlie, Ning-Ning Feng, Laeticia Petit, Anu Agarwal, Kathleen Richardson, and Lionel Kimerling "Design, fabrication. and integration of HIC glass waveguides on a silicon platform", Proc. SPIE 6896, Integrated Optics: Devices, Materials, and Technologies XII, 68960Z (12 February 2008); https://doi.org/10.1117/12.763588

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KEYWORDS

Waveguides

GRIN lenses

Cladding

Glasses

Optical lithography

Silicon

Scattering

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