3D MOEMS-based optical micro-bench platform for the miniaturization of sensing devices

Sonia Garcia-Blanco; Jean-Sol Caron; Sébastien Leclair; Patrice A. Topart; Hubert Jerominek

doi:10.1117/12.761339

8 February 2008 3D MOEMS-based optical micro-bench platform for the miniaturization of sensing devices

Sonia Garcia-Blanco, Jean-Sol Caron, Sébastien Leclair, Patrice A. Topart, Hubert Jerominek

Proceedings Volume 6887, MOEMS and Miniaturized Systems VII; 68870F (2008) https://doi.org/10.1117/12.761339
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

As we enter into the 21st century, the need for miniaturized portable diagnostic devices is increasing continuously. Portable devices find important applications for point-of-care diagnostics, patient self-monitoring and in remote areas, such as unpopulated regions where the cost of large laboratory facilities is not justifiable, underdeveloped countries and other remote locations such as space missions. The advantage of miniaturized sensing optical systems includes not only the reduced weight and size but also reduced cost, decreased time to results and robustness (e.g. no need for frequent re-alignments). Recent advances in micro-fabrication and assembly technologies have enabled important developments in the field of miniaturized sensing systems. INO has developed a technology platform for the three dimensional integration of MOEMS on an optical microbench. Building blocks of the platform include microlenses, micromirrors, dichroic beamsplitters, filters and optical fibers, which can be positioned using passive alignment structures to build the desired miniaturised system. The technology involves standard microfabrication, thick resist UV-lithography, thick metal electroplating, soldering, replication in sol-gel materials and flip-chip bonding processes. The technology is compatible with wafer-to-wafer bonding. A placement accuracy of ± 5 μm has been demonstrated thanks to the integration of alignment marks co registered with other optical elements fabricated on different wafers. In this paper, the building blocks of the technology will be detailed. The design and fabrication of a 5x5 channels light processing unit including optical fibers, mirrors and collimating microlenses will be described. Application of the technology to various kinds of sensing devices will be discussed.

Citation Download Citation

Sonia Garcia-Blanco, Jean-Sol Caron, Sébastien Leclair, Patrice A. Topart, and Hubert Jerominek "3D MOEMS-based optical micro-bench platform for the miniaturization of sensing devices", Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 68870F (8 February 2008); https://doi.org/10.1117/12.761339

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available