Direct-write patterning of nanostructured sensory waveguides for integrated optical bioimaging applications

Mohamad Hajj-Hassan; Timothy Gonzalez; Hagop Djeghelian; Ebrahim Ghafar-Zadeh; Daniel Therriault; Vamsy Chodavarapu; Mark Andrews

doi:10.1117/12.763965

22 February 2008 Direct-write patterning of nanostructured sensory waveguides for integrated optical bioimaging applications

Mohamad Hajj-Hassan, Timothy Gonzalez, Hagop Djeghelian, Ebrahim Ghafar-Zadeh, Daniel Therriault, Vamsy Chodavarapu, Mark Andrews

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Proceedings Volume 6865, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications V; 686504 (2008) https://doi.org/10.1117/12.763965
Event: SPIE BiOS, 2008, San Jose, California, United States

Abstract

We report the development of a novel methodology for patterning of nanostructured sensory materials using multi-dimensional microstructured support platforms for optical bioimaging applications. Specifically, the support platforms are fabricated using direct-write technique and sol-gel derived xerogel thin-films to form the sensor materials. This creates a simple and versatile method for developing complex 3-D microstructures that have the combined capabilities of biochemical sensing, microfluidic sample distribution for sensor arrays, and direct integration with Complimentary Metal-Oxide Semiconductor (CMOS) Integrated Circuits (ICs) used for sensor signal detection and processing. More importantly, this methodology would enable the development of large-scale arrayed sensing platforms for applications in cell-culture analysis and tissue imaging. The configuration and fabrication of the proposed microstructures, which consist of planar ridge and hollow waveguides, will be described in detail. As a prototype implementation, we demonstrate direct-write ridge waveguide support structures coated with luminophore-doped xerogels that are responsive to gaseous oxygen (O₂) concentration.

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Mohamad Hajj-Hassan, Timothy Gonzalez, Hagop Djeghelian, Ebrahim Ghafar-Zadeh, Daniel Therriault, Vamsy Chodavarapu, and Mark Andrews "Direct-write patterning of nanostructured sensory waveguides for integrated optical bioimaging applications", Proc. SPIE 6865, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications V, 686504 (22 February 2008); https://doi.org/10.1117/12.763965

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KEYWORDS

Waveguides

Sensors

Oxygen

Epoxies

Microfluidics

Fabrication

Nanostructuring

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