High-speed and large-scale electromagnetically actuated MEMS scanning-mirror

Canjun Mu; Feiling Zhang; Yaming Wu

doi:10.1117/12.768475

4 January 2008 High-speed and large-scale electromagnetically actuated MEMS scanning-mirror

Canjun Mu, Feiling Zhang, Yaming Wu

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 683609 (2008) https://doi.org/10.1117/12.768475
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Large-scale micro-electromechanical systems (MEMS) scanning mirrors play a primary role in many fields of manipulating light beam scanning, such as rapid optical spectrum analyzers (OSAs) based on dispersive gratings using in near infrared (NIR) region. According to the applications, a high speed electromagnetically actuated MEMS scanning mirror with large mirror area of 9×6mm² has been developed. The MEMS scanning mirror chip, which is fabricated using bulk silicon micromachining process and electroplating technique, is immersed in a constant 365 mT magnetic field parallel to the coil plane and generates the maximum optical deflection angle of ±11.15° at the 1.39 kHz resonant frequency. The quality factor, Q, of 77 is achieved in air corresponding to a low power consumption of 102.6 mW. In addition, the surface roughness of less than 20nm for scanning mirror has been measured and the optical reflectivity at the wavelength of 1550nm is high up to 87%. The results show that the device is adequate for mm-sized scanning systems and compatible with smart OSAs applications.

Citation Download Citation

Canjun Mu, Feiling Zhang, and Yaming Wu "High-speed and large-scale electromagnetically actuated MEMS scanning-mirror", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683609 (4 January 2008); https://doi.org/10.1117/12.768475

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