Paper
26 November 2007 Nonlinearity correction method study of orthogonal polarized laser interference signal based on DSP technique
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Abstract
A nonlinearity correction using ellipse fitting technique based on orthogonal polarized laser interferometer is proposed in this paper. In this paper, characteristics of four-channel output signals based on polarized Michelson laser interferometer are studied. The orthogonal signal's non-orthogonal error which is caused by temperature disturbance and low frequency vibration noise is compensated. Besides, a new algorithm of demodulating small phase signal is proposed. Low frequency vibration signal demodulation system based on DSP technique is constructed. It proposed an ellipse fitting algorithm based on Least-squares theory. This algorithm can achieve correction error of less than ±0.3%. System's real-time measurement capability and its resolution can be improved.
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Xin-xing Wang, Jun Yang, Zhi-hai Liu, and Li-bo Yuan "Nonlinearity correction method study of orthogonal polarized laser interference signal based on DSP technique", Proc. SPIE 6830, Advanced Sensor Systems and Applications III, 68300K (26 November 2007); https://doi.org/10.1117/12.757168
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KEYWORDS
Digital signal processing

Interferometers

Beam splitters

Demodulation

Laser interferometry

Homodyne detection

Interferometry

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