Microstructured humidity sensors fabricated by glancing angle deposition: characterization and performance evaluation

Kathleen M. Krause; Andy van Popta; John J. Steele; Jeremy C. Sit; Michael J. Brett

doi:10.1117/12.759533

9 January 2008 Microstructured humidity sensors fabricated by glancing angle deposition: characterization and performance evaluation

Kathleen M. Krause, Andy van Popta, John J. Steele, Jeremy C. Sit, Michael J. Brett

Author Affiliations +

Proceedings Volume 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV; 68000Y (2008) https://doi.org/10.1117/12.759533
Event: SPIE Microelectronics, MEMS, and Nanotechnology, 2007, Canberra, ACT, Australia

Abstract

We have used the glancing angle deposition technique to fabricate highly porous nanostructured optical thin films that act as humidity sensors. The responsiveness and repeatability of these sensors has been investigated for samples stored under different environmental conditions. It has been found that samples stored in air have a more stable performance than those stored in a dry nitrogen environment. It has also been found that annealing impacts the responsiveness of the optical thin film sensors.

Citation Download Citation

Kathleen M. Krause, Andy van Popta, John J. Steele, Jeremy C. Sit, and Michael J. Brett "Microstructured humidity sensors fabricated by glancing angle deposition: characterization and performance evaluation", Proc. SPIE 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV, 68000Y (9 January 2008); https://doi.org/10.1117/12.759533

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