Longscan Surface Profile Measurements Using A Phase-Modulated Mirau Interferometer

E R Cochran; J C Wyant

doi:10.1117/12.939600

23 March 1987 Longscan Surface Profile Measurements Using A Phase-Modulated Mirau Interferometer

E R Cochran, J C Wyant

Proceedings Volume 0680, Surface Characterization and Testing; (1987) https://doi.org/10.1117/12.939600
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

A method for extending the measurement range of a two-dimensional optical profiler is described. Using a phase-modulated Mirau interferometer coupled to a microscope with a computer controlled stage a high density of data points is obtained over an extended region. Successive interferograms are combined by matching the piston and tilt of each scan to the proceeding scan. This instrument provides surface roughness measurements for a wide variety of surfaces which are quick and non-contact. This paper examines important features of the profiler as well as presenting data of the rms surface roughness of several substrates.

Citation Download Citation

E R Cochran and J C Wyant "Longscan Surface Profile Measurements Using A Phase-Modulated Mirau Interferometer", Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); https://doi.org/10.1117/12.939600

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