Analysis on the influencing factors of deformation in bimorph deformable mirror

Yu Ning; Wenhan Jiang; Ning Ling; Changhui Rao

doi:10.1117/12.782918

21 November 2007 Analysis on the influencing factors of deformation in bimorph deformable mirror

Yu Ning, Wenhan Jiang, Ning Ling, Changhui Rao

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67241P (2007) https://doi.org/10.1117/12.782918
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Numerical calculation is used to investigate influencing factors on the surface displacement of a bimorph deformable mirror. It's shown that the value of response function is direct proportional to the loading voltage, inverse proportional to the square of the thickness of PZT layer, and increased about 1.4 times when the area of the electrode doubles. Besides, the displacement is closely related to the distance of the control layer from median plane. As a conclusion, the farther electrode contributes the larger deformation. Furthermore, we have discussed the problem of singular solutions at inner and outer boundary.

Citation Download Citation

Yu Ning, Wenhan Jiang, Ning Ling, and Changhui Rao "Analysis on the influencing factors of deformation in bimorph deformable mirror", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241P (21 November 2007); https://doi.org/10.1117/12.782918

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