Microscopic interferometry for dimensional characterization of MEMS devices

Tong Guo; Jin-Ping Chen; Xing Fu; Xiao-tang Hu

doi:10.1117/12.782690

19 November 2007 Microscopic interferometry for dimensional characterization of MEMS devices

Tong Guo, Jin-Ping Chen, Xing Fu, Xiao-tang Hu

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67240S (2007) https://doi.org/10.1117/12.782690
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Microscopic interferometry for dimensional characterization and device inspection is described in this paper. This method is characteristic of fast speed, non-destructive, non-contact, and easy to be carried out at wafer scale with submicrometer lateral resolution and nanoscale vertical resolution. The measurement system is based on a Mirau microscopic interferometric objective with a piezo objective nano-positioner to realize accurate phase shifting and scanning in vertical direction in the range of one hundred micrometers. The method consists of phase shifting interferometry (PSI) and vertical scanning interferometry (VSI), the former can measure smooth surface with high accuracy and the latter can measure samples with large step variations. The measurement accuracy of the system is calibrated by a step height standard certificated by NIST. Two MEMS devices are employed to illustrate the capability of the system which is regarded as as a measurement and process characterization tool.

Citation Download Citation

Tong Guo, Jin-Ping Chen, Xing Fu, and Xiao-tang Hu "Microscopic interferometry for dimensional characterization of MEMS devices", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240S (19 November 2007); https://doi.org/10.1117/12.782690

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available